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WML Series In-Line Lifetime Tester (on-the-fly)

Carrier lifetime is a primary quality control parameter for silicon wafers in PV applications. The WML models, WML-1 & WML-3, Lifetime Testers allow measurement of wafers “on the fly," i.e., conveyor belt does not stop during measurement. Therefore, they have the high throughput that meets the requirements of in-line quality control in fully automated wafer and cell production lines.

SYSTEM SPECIFICATIONS:
measurement technique:
µ-PCD
sample size:
100 to 210mm
lifetime range:
0.1-1000µs
repeatability:
3%
measured spot diameter:
3mm
probe height above transport belt:
4mm
wafer vertical position tolerance:
<300 µm peak to peak, including vibration
number of line scans: 1 (WML-1) or 3 (WML-3)
measurement position:
adjustable
sample support:
on belt
system dimensions:
135mmx460mmx403mm (WxHxD)
sample throughput:
35 point line scan on a 156x156mm wafer, with belt speed of 250 mm/s
Additional configurations available if needed
IN-LINE APPLICATION:
Incoming wafer inspection and sorting
After emitter diffusion: efficiency prediction


CONFIGURATION OF A SYSTEM :
WML measurement module (incl. 1-3 lifetime measurement heads)
Industrial PC (Windows operating system) and peripherals
Interface (hardware & software) to automation