Thickness and resistivity are primary quality control parameters for silicon wafers in PV applications. The WLT models, WLT-1, -3 & -5 In-Line Thickness and Resistivity Testers allow measurement of thickness at 1 to 5 points and resistivity at 1 point with the high throughput that meets the requirements of in-line quality control in fully automated wafer production lines.
SYSTEM SPECIFICATIONS:
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sample size:
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100 to 210mm |
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measurement time:
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0.8s |
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measurement position:
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adjustable |
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distance between top and bottom sensors:
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4mm |
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sample support:
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on belt |
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wafer vertical position tolerance:
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<300µm |
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system dimensions:
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400x398x360mm |
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| Resistivity: |
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| measurement technique: |
eddy current |
| range: |
0.3-15ohmcm |
| accuracy: |
5% |
| repeatability: |
2% |
| measurement spot size: |
10mm |
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| Thickness: |
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| measurement technique: |
capacitive gauging |
| range: |
100µm-1.5mm |
| accuracy: |
1% or ±5µm |
| repeatability: |
0.5% |
| measurement spot size: |
10mm |
| Additional configurations available if needed |
