Carrier lifetime is a primary quality control parameter for silicon wafers in PV applications. The WLL models, WLL-1, -3 & -5 In-Line Lifetime Testers allow measurement of lifetime at 1 to 5 points with the high throughput that meets the requirements of in-line quality control in fully automated wafer production lines
SYSTEM SPECIFICATIONS:
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| measurement technique: |
µ-PCD |
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sample size:
|
100 to 210mm |
| lifetime range |
0.1-1000µs |
| Repeatability: |
3% |
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measurement time:
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0.8s |
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measurement position:
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adjustable |
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measured spot diameter:
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4mm (standard) |
| probe height above transport belt: |
4mm |
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sample support:
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on belt |
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wafer vertical position tolerance:
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<300µm peak to peak including vibration |
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system dimensions:
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400x398x360mm |
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| IN-LINE APPLICATION: |
| • |
Incoming wafer inspection and sorting
after emitter diffusion: efficiency prediction
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CONFIGURATION OF A SYSTEM : |
| • |
WLL module with appropriate number of measurement heads
|
| • |
Industrial PC (Windows® operating system) and peripherals
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| • |
Interface (hardware & software) to automation |
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