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SHR

Semilab’s SHR technique is used to make non-contact measurements of emitter sheet resistance.  The output is in ohms/square, similar to a 4-point probe, but it can measure through a layer of glass.  It works by shining a pulse light source at a spot on the cell.  The light creates a voltage by solar cell action.  The voltage spreads through the cell, and capacitive electrodes can determine whether the voltage is decaying quickly (high sheet resistance) or slowly (high conductivity).

 

The SHR-1000 uses this technology to make single point measurement of emitter sheet resistance.  The capability is also available in the WT-2000PV mapping system, and the CMS and CLS series of In-Line systems use the same technology to measure emitter sheet resistance of wafers as they move through a production line.