Semilab’s SHR technique is used to make non-contact measurements of emitter sheet resistance. The output is in ohms/square, similar to a 4-point probe, but it can measure through a layer of glass. It works by shining a pulse light source at a spot on the cell. The light creates a voltage by solar cell action. The voltage spreads through the cell, and capacitive electrodes can determine whether the voltage is decaying quickly (high sheet resistance) or slowly (high conductivity).
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The SHR-1000 uses this technology to make single point measurement of emitter sheet resistance. The capability is also available in the WT-2000PV mapping system, and the CMS and CLS series of In-Line systems use the same technology to measure emitter sheet resistance of wafers as they move through a production line.
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