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SHR-1000 Sheet Resistance Tester for Wafers


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Non-contact
Preparation free
Applicable on coated samples (phosphorous glass)
High speed
Production line compatible
Alternative method to the traditional four-point-probe
Detection of shunts

PRINCIPLE OF OPERATION:
Light excitation of the n+p or p+n layer structure and pick up of the resulting surface potential by capacitive probe. The detected potential is determined by the sheet resistance of the material.


Data correlation with four-point-probe