LST-01
Light Scattering Tomography
BMD Analyzer
The BMD scatters the incident light which is recorded by a CCD camera near to the cleaved edge of the sample.
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Highlights:
- High speed
- High depth resolution
- Detectable particle size down to 12nm
System Specifications
- DZ determination from one image concentration distribution along the wafer diameter within minutes
- depth resolution: 0.5µm
- first particle detected within 0.5µm from the surface
- fully automatic operation including half wafer handling
- wafer diameter up to 12 inch
- whole wafer diameter scan image size: 400 µm x 2mm with measuring time of 40 s
- autofocusing on the cleaved surface
- weight: max. 350 kg
- dimensions:
- width:1400 mm
- depth:1200 mm
- height:1800 mm
Facility Requirements
- Power requirement: max. 800 W, 100-240 V, 50/60 Hz
- Vacuum: 0-0.3 bar, max. 1-2 l/min
- Temperature of operation: 23°C ± 3°C; 1°C/hour
- Cleanroom: better or equal to Class 10000
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