Three models of Epimet systems provide 100% non-contact, non-destructive measurements of epi layer resistivity via patented technology. The physics behind the measurement is quite similar to CV Schottky or Hg-probe, and thus the output is a traditional CV doping profile. The difference is that the electrode does not touch the wafer, resulting in substantial cost savings of monitor wafers.
All models include complete automation, powerful software, and excellent measurement repeatability.
Epimet was originally developed by SemiTest, and Semilab continues to sell, support, and improve the product.
