LST BULK MICRODEFECT ANALYZER

The LST Light Scattering Tomograph provides a fast measurement technique for monitoring bulk microdefects and determination of denuded zone.

    PRODUCT HIGHLIGHTS
  • High speed: 1s / image
  • DZ determination in 1s from one image
  • High depth resolution: 1mm
  • Detectable size: down to 10nm
  • IConcentration distribution along wafer diameter within minutes

APPLICATIONS

  • Denuded zone determination
  • Near surface analysis

    • To request additional information, please contact us: semilab@semilab.hu