New tool for BMD analysis

    The LST Light Scattering Tomograph provides a fast measurement technique for monitoring bulk microdefects and determination of denuded zone.


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    SEMILAB is a leading supplier of state-of-the-art metrology systems for the semiconductor and photovoltaic industry as well as for scientific investigation. SEMILAB is also your partner in research and development.

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    SEMILAB's products are useful tools to characterize contamination and defects in semiconductor material. Their high accuracy and sensitivity as well as their easy-to-use software make their application possible both for wafer and device manufacturers as well as for universities and research institues.